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发明名称
PIRANI GAUGE
摘要
申请公布号
JPH03255926(A)
申请公布日期
1991.11.14
申请号
JP19900054712
申请日期
1990.03.06
申请人
ULVAC JAPAN LTD
发明人
KAKU AKIRA;NAKAMURA SHIZUO
分类号
G01L21/12
主分类号
G01L21/12
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