DETECTING APPARATUS FOR PATTERN,申请号JP19900053292-传众专利搜索

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发明名称	DETECTING APPARATUS FOR PATTERN
摘要
申请公布号	JPH03255302(A)	申请公布日期	1991.11.14
申请号	JP19900053292	申请日期	1990.03.05
申请人	MITSUBISHI ELECTRIC CORP	发明人	YAGI YASUSHI;KAWATO SHINJIRO;TAKENAKA TOSHIO
分类号	G01B11/24	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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