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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03255614(A)
申请公布日期
1991.11.14
申请号
JP19900054113
申请日期
1990.03.05
申请人
NEC CORP
发明人
HIRAKAWA KATSUNORI
分类号
H01L21/30;H01L21/027
主分类号
H01L21/30
代理机构
代理人
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地址
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