| 摘要 |
PURPOSE:To restrain the occurrence of O2 gas in a preionization discharge so as to obtain stable laser rays of high power by a method wherein a dielectric material is fitted to the tip of, at least, either of preionization electrodes. CONSTITUTION:A dielectric 12 is fixed to the tips of preionization electrodes 10 and 11 provided to both the sides of primary electrodes 1 and 2 respectively. As the tips of the preionization electrodes 10 and 11 are covered with the dielectrics 12, a preionization discharge induced between the preionization electrodes 10 and 11 can be made to occur in a corona discharge, so that laser gas can be sharply decreased in decomposition. In result, a glow discharge between the primary discharge electrodes can be made stable, so that a pulse laser device of this design can be prevented from deteriorating in laser output. Furthermore, the laser gas can be prevented from deteriorating in service life due to impurity gases or metal particles induced by a spark discharge. |
