| 摘要 |
An interferometer system includes an integrated structure including a plurality of interferometer optical systems on a unitary glass cube for the optical element. The system includes dual integrated, parallel interferometers to form a two axis system in the unitary element. Each interferometer is a 90 degree version of a straight line interferometer, with a plane mirror interferometer laser beam path for each single interferometer. The glass cube contains a diagonal polarization interface between two glass segments which are bonded together. Cube corners and quarter wave plates are employed. A half wave plate is employed in one design. The system is a prealigned assembly and it measures translation in one version, translation and theta in another version and pitch, theta and translation in another version. |
