| 摘要 |
PURPOSE:To specify the coordinates of a defective pattern automatically by moving a substrate from the coordinates of the left (right) image wherein left and right image signals disagree by an aligning interval, picking up the image of a detecting block for the coordinates with left/right image sensing parts, and comparing the signals. CONSTITUTION:In the upper stage, coordinates C1 wherein left and right signals dis agree are read out, and a screen L of a left image sensing part is made to agree with the coordinate C1. A screen R of a right image sensing part is made to agree with coordinates C2. A substrate moving direction (d) is determined by the first judging operation and indicated as the left direction. When the substrate is moved leftward by an aligning interval LD as shown in the lower stage, the coordinates C1 are moved leftward from the screen L of the left image sensing part by the aligning interval LD. The images of coordinates C2 are picked up the displayed on the screen L of the left image sensing part. The images of coordinates 3 are picked up and displayed on the screen R of the right image sensing part. At this time, the left and right image signals of the left and right image sensing parts are compared, and whether the signals agree or not is justed. The signals agree (L=R) in this case, and it is recognized that there is a defective pattern in the coordinates C1. |
