PRODUCTION OF DISTRIBUTED INDEX TAPERED WAVEGUIDE

摘要

PURPOSE:To allow highly efficient coupling of light with an inexpensive and simple stage by depositing an optical waveguide forming material by evaporation to a tapered shape on a substrate and heating the substrate to diffuse the optical waveguide forming material into the substrate, thereby forming a light introducing path. CONSTITUTION:The optical waveguide forming material is lowered onto the substrate 1 and a mask 14 is provided on the substrate 1 to provide the region A where the optical waveguide forming material is deposited by evaporation on the substrate 1 and the region B where this material is not deposited by evaporation. The mask 14 is slid in the direction to diminish the region B where the above-mentioned material is not deposited by evaporation. The optical waveguide forming material to be deposited by evaporation on the substrate 1 is then deposited by evaporation to the tapered shape. The substrate 1 is heated to diffuse the optical waveguide forming material on the substrate 1 into the substrate, by which the optical waveguide is formed. The highly efficient coupling of the light is executed with the inexpensive and simple stage in this way.