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发明名称
SEMICONDUCTOR FORCE SENSOR
摘要
申请公布号
JPH03255326(A)
申请公布日期
1991.11.14
申请号
JP19900298034
申请日期
1990.11.01
申请人
MATSUSHITA ELECTRON CORP
发明人
KANEKO CHUKEI;TSUDA NAOYUKI;YAMAGUCHI TSUNEO
分类号
G01L9/04;G01L1/18;G01L9/00
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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