| 摘要 |
PURPOSE:To easily remove a dust without additionally providing a fan or a pump by a method wherein a fan which enables gas to be circulated in a gas vessel and a dust filter which adsorbs dusts induced by discharge are provided inside the gas container. CONSTITUTION:Gas blown off by a fan 2 which enables gas to be circulated in a gas container 1 charged with laser gas is made to flow through a discharge space between the opposed primary discharge electrodes 4 at a high speed passing through a main flow path 3 and sucked in the fan 2 again as cooled by a heat exchanger 5. On the other hand, a part of gas circulated by the fan 2 is made to flow through a bypass 6 provided by the main flow path 3 and returned to the main flow path. By properly selecting the openings of the bypass 6 in number, size, and position, gas can be made to flow through a dust filter 7 without much degrading gas which flows through the main flow path 3 in speed. |
