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经营范围
发明名称
VERTICAL TYPE CVD DEVICE
摘要
申请公布号
JPH03255618(A)
申请公布日期
1991.11.14
申请号
JP19900054226
申请日期
1990.03.05
申请人
FUJITSU LTD
发明人
TSUKUNE ATSUHIRO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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