| 摘要 |
PURPOSE:To prevent smear of a thin-film surface due to thin-film fine particles which scatters when a beam is projected by forming a smear-preventing film on the thin film previously and then eliminating this smear-preventing film after machining by the beam. CONSTITUTION:A smear-preventing film 1 is formed on a surface of a thin film 2 previously, an energy beam 5 is projected onto this smear-preventing film 1 to allow a desired part of the smear-preventing film 1 and a thin film 2 to be eliminated, and then the smear-preventing film 1 on the thin film 2 which has not been eliminated is eliminated. Thus, the thin films which scattered due to pumping phenomenon etc., attach onto the smear-preventing film 1, and the thin films which attach onto the smear-preventing film 1 are eliminated along with the smear-preventing film 1 after irradiation with the energy beam 5. Thus preventing thin pieces of the thin film which scattered onto the surface of the thin film 2 from remaining, thus preventing the surface of the thin film 2 from being smeared and enabling the desired part of the thin film 2 to be eliminated. |
