| 摘要 |
PURPOSE:To reduce the manhour in inspection and get a highly reliable ceramic board by performing the open check by the continuity check of the check patterns in the same system, and performing the short check by the continuity check between the check patterns in a different system. CONSTITUTION:By performing the continuity check of the check patterns 3 in the same system, it is checked whether or not the through vias 2, 2,... connected continuously to the check pattern 3 in the same system are formed correctly without opening. Furthermore, by checking the continuity between respectively independent adjacent check patterns 3 and 3 in the different systems, it is checked whether or not shortage is occurring between the adjacent through vias 2 and 2 respectively connected to the check patterns 3 and 3 in the different systems. Accordingly, the inspection of the ceramic substrate, as is easy to short when made in high density, can be performed easily and surely. Hereby, the manhour for inspection can be reduced, and also a highly reliable ceramic substrate can be gotten. |
