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发明名称
A SPIN DRYER FOR SEMICONDUCTOR MATERIALS
摘要
申请公布号
GB9121062(D0)
申请公布日期
1991.11.13
申请号
GB19910021062
申请日期
1991.10.03
申请人
AIGO SEIICHIRO
发明人
分类号
B01D46/42;F26B5/08;H01L21/00;H01L21/304
主分类号
B01D46/42
代理机构
代理人
主权项
地址
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