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发明名称
SPUTTERING TYPE PARTICLE SUPPLYING SOURCE AND PROCESSING DEVICE USING THIS SOURCE
摘要
申请公布号
JPH03253561(A)
申请公布日期
1991.11.12
申请号
JP19900049447
申请日期
1990.03.02
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
TORII YASUHIRO;SHIMADA MASARU;WATANABE IWAO
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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