| 摘要 |
An energy dispersive X-ray spectrometer used in combination with an electron microscope is disclosed, in which the energy of an electron beam of the electron microscope, with which a sample is irradiated, is determined exactly by detecting the disappearance point of the energy dispersive X-ray spectra on the high energy side, this energy of the irradiation electron beam thus determined being used as a parameter in a calculation for the quantitative energy dispersive X-ray analysis.
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