Pressure sensor and method for calibrating pressure sensors

摘要

A precision pressure sensor in the form of a load cell has a mounting ring closed at one end by an end wall which has axially outwardly facing dead-end holes therein to form sensor beams each having an axially outwardly facing plane surface to which strain gages are bonded. The dead-end holes have bottoms forming sensor membranes. Opposite the closed end the mounting ring encloses a cavity forming a sensor space which is closed by a closure plug that simultaneously has a bore for admitting fluid under pressure to be measured into the sensor space. A ring groove in the end wall has approximately radially sloping surfaces which together with the dead-end holes determine the minimum cross-section of the measuring beams. The ring groove also determines the minimum thickness of the sensor membranes.