| 摘要 |
PURPOSE:To make it possible to increase the degree of accuracy of starting in a low velocity region, driving and stopping in the case of stopping and, at the same time, to drive with high degree of accuracy of a high velocity even in a specific high velocity region by arranging slide mechanism to an ultrasonic linear motor in parallel. CONSTITUTION:A table 5 is driven by an ultrasonic linear motor in a low velocity region in the case of starting and stopping by arranging rodless cylinders 6 to the ultrasonic linear motor in parallel. When the table 5 reaches a specific high velocity region, it is driven with a high velocity by driving the rodless cylinders 6. |
