| 摘要 |
PURPOSE:To obtain the apparatus for producing the optical element which is improved in the adhesive property of optical thin films without peeling from substrate surfaces by heating and evaporating a coating material in the state of impressing a high voltage to a metallic piece and forming the films on the substrates via the periphery of the metallic piece with the evaporated material. CONSTITUTION:This apparatus is constituted by providing the metallic piece 6 and a means 7 for impressing the high voltage, etc. Many electrons are scattered from the electron beam spread at a wide angle via the coating material 5 when this coating material is irradiated with the electron beam from a light source 4 in the state of impressing the high voltage to the metallic piece 6. On the other hand, an electric field is generated between the material 5 and the metallic piece 6 under the impression. The many electrons are attracted to the metallic piece by the suction effect of this electric field and the films of the material evaporated from the electron beam are formed on the respective substrates 3 via the periphery of the metallic piece 6. The contact of the many electrons to the substrates 3 is obviated in this constitution and the peeling of the optical thin films formed on the substrates from the evaporated material via the periphery of the metallic piece from these substrates is obviated as well. |
