| 摘要 |
PURPOSE:To provide an excellent antireflection effect over a wide wavelength region and to obtain sufficient durability by laminating a 1st layer consisting of CeO2, a 2nd layer consisting of the composite of TiO2 and HfO2 or the TiO2 and a 3rd layer consisting of SiO2 on an optical member made of a synthetic resin successively from the front surface side thereof. CONSTITUTION:The planar optical part (a) molded of an acrylic resin having a special alicyclic group is subjected to precise washing and drying and the 1st layer (b) is formed thereon by using a target consisting of the CeO2 and executing vapor deposition by electron beam heating with a vacuum vapor deposition device. The 2nd layer (c) is formed on this 1st layer (b) by using a target consisting of the TiO2 and executing the vapor deposition in the same manner. Further, the 3rd layer (d) is formed on the 2nd layer (c) by using a target consisting of the SiO2 and executing the vapor deposition in the same manner, by which the antireflection films of the 3-layered constitution are obtd. The antireflection film which maintains a low reflectivity over the range of a wide wavelength region and has excellent durability is obtd. in this way. |
