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发明名称
TEMPERATURE CONTROL METHOD FOR VAPOR GROWTH DEVICE
摘要
申请公布号
JPH03252127(A)
申请公布日期
1991.11.11
申请号
JP19900050295
申请日期
1990.02.28
申请人
KYUSHU ELECTRON METAL CO LTD;OSAKA TITANIUM CO LTD
发明人
MATSUDA MASAHIKO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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