| 摘要 |
PURPOSE:To obtain a stable tunneling current and a high-resolution image plane of good quality by composing a tripod-shaped moving mechanism of piezoelectric elements having piezoelectric bodies made of single-crystal materials of bismuth germanium oxide (BGO). CONSTITUTION:The piezoelectric bodies 6 of the respective peizoelectric elements 3, 4 and 5 which constitute the tripod type moving mechanism are made of the single crystal materials of BGO, which are cut in a rectangular shape along a (110) plane to provide electrodes 7 by palladium printing in the direction of the (110) plane. The elements 3, 4, and 5 are arranged at right angles to one another, respective one-end sides are joined with an insulation block 2, and the other-end sides are joined with the vertical part and horizontal parts of a rack 8. Consequently, when driving voltage are applied to the piezoelectric elements 3, 4, and 5 constituting the tripod type moving mechanism, gas discharge from the piezoelectric elements 3, 4 and 5 is reduced and the degree of vacuum in a vacuum container is stabilized to obtain the stable tunneling current. |
