CHARGED PARTICLE BEAM DEVICE,申请号JP19900048523-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号	JPH03252037(A)	申请公布日期	1991.11.11
申请号	JP19900048523	申请日期	1990.02.28
申请人	JEOL LTD	发明人	SAWARAGI HIROSHI
分类号	H01J37/248;H01J37/317	主分类号	H01J37/248
代理机构		代理人
主权项
地址

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