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发明名称
SOCKET FOR MEASUREMENT
摘要
申请公布号
JPH03249573(A)
申请公布日期
1991.11.07
申请号
JP19900045455
申请日期
1990.02.28
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD
发明人
KIKUTA SEIJI
分类号
G01R31/26;H01R33/74;H01R33/76
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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