| 摘要 |
PURPOSE:To obtain a stable output by a method wherein an inner tube constituting a laser gas chamber is provided at the inside and an outer tube constituting a ring-shaped chamber extended so as to surround the inner tube is provided, discharge electrodes are attached to the outer circumference face of the inner tube and dry air is supplied to the ring-shaped chamber. CONSTITUTION:Electrodes 31, 33 as discharge electrodes are arranged so as to face each other in a state that they are pasted on the outer circumference face of an inner tube 1; a high voltage is applied to the electrodes 31, 33 from a high-voltage and high-frequency power supply 35; an electric discharge is executed so as to be traversed in a laser gas chamber 5. Dry air is supplied to a ring-shaped chamber 19 inside an outer tube 3; the humidity of the dry air in the ring-shaped chamber 19 is controlled to a definite value. Thereby, the electric discharge is executed without being influenced by the humidity of the open air. The inner tube 1 is cooled by the dry air supplied to the ring- shaped chamber 19; a temperature rise of the inner tube by the electric discharge is suppressed. Thereby, the electric discharge is executed stably in a state that a change in a load impedance against the injected electric power is small in the gas chamber 5. |
