发明名称 |
Alarm system for a crystal growing furnace |
摘要 |
The present invention monitors thermocouple data from a semiconductor furnace. The data is checked against a first set of profiles which mimic an intended operational temperature profile for the furnace. If the temperature measured in any zone of the furnace falls outside a first set of maximum and minimum limits fixed by the mimicking profiles, a warning is generated thereby giving operational personnel an opportunity to correct the condition. If the condition remains unchecked and further deviation occurs, a second condition is reached as defined by a corresponding second set of mimicking maximum and minimum profiles. This condition is established as a serious condition which will cause a microprocessor to terminate power supply to the furnace. Otherwise, the quality of the grown crystal would be jeopardized; or sufficiently excessive power would be delivered to the furnace so as to cause its damage or destruction.
|
申请公布号 |
US5063518(A) |
申请公布日期 |
1991.11.05 |
申请号 |
US19890437420 |
申请日期 |
1989.11.16 |
申请人 |
GRUMMAN AEROSPACE CORPORATION |
发明人 |
CURRERI, VICTOR;KLEIN, JOHN;DUBOIS, JANINE |
分类号 |
H05B3/00;C30B9/00;C30B11/00;C30B13/28;C30B15/20;C30B19/10;F27D19/00;F27D21/00;F27D21/04;G05D23/22 |
主分类号 |
H05B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|