DETECTION OF CONTACT OF SEED CRYSTAL,申请号JP19900040744-传众专利搜索

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发明名称	DETECTION OF CONTACT OF SEED CRYSTAL
摘要
申请公布号	JPH03247587(A)	申请公布日期	1991.11.05
申请号	JP19900040744	申请日期	1990.02.21
申请人	SHOWA DENKO KK	发明人	UCHIKAWA MASAHIKO
分类号	C30B15/20;H01L21/208	主分类号	C30B15/20
代理机构		代理人
主权项
地址

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