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发明名称
摘要
申请公布号	JPH0369809(B2)	申请公布日期	1991.11.05
申请号	JP19850234049	申请日期	1985.10.18
申请人	KIMATA KAZUO	发明人	KIMATA KAZUO
分类号	B65G49/00;B65G25/06;H01L21/67;H01L21/677;H01L21/68	主分类号	B65G49/00
代理机构		代理人
主权项
地址

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