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发明名称
FORMATION OF FILM
摘要
申请公布号
JPH03247763(A)
申请公布日期
1991.11.05
申请号
JP19900046266
申请日期
1990.02.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
HASHIMOTO YOICHI;MAEYAMA NORITAKA
分类号
C23C14/58
主分类号
C23C14/58
代理机构
代理人
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