CLEANING AND DRYING EQUIPMENT,申请号JP19900042477-传众专利搜索

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发明名称	CLEANING AND DRYING EQUIPMENT
摘要
申请公布号	JPH03246939(A)	申请公布日期	1991.11.05
申请号	JP19900042477	申请日期	1990.02.26
申请人	SHIMADA PHYS & CHEM IND CO LTD	发明人	OISHI MITSURU
分类号	B08B3/08;H01L21/304	主分类号	B08B3/08
代理机构		代理人
主权项
地址

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