发明名称 Method for combining die attach and wirebond in the assembly of a semiconductor package
摘要 An improved system for the production of semiconductor devices is described. The invention incorporates conventional die attach and wire bond means into a simplified, common machine system. An independently mounted, computer-controlled, television camera system observes, monitors, and controls the operational steps of the die attach wire bond process using a close loop process. The invention serves to increase throughput and yields while reducing variation of the finished product.
申请公布号 US5062565(A) 申请公布日期 1991.11.05
申请号 US19900553099 申请日期 1990.07.13
申请人 MICRON TECHNOLOGY, INC. 发明人 WOOD, ALAN G.;FARNWORTH, WARREN M.;MCGILL, GEORGE P.
分类号 H01L21/00 主分类号 H01L21/00
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