SPUTTERING TARGET DEVICE,申请号JP19900044193-传众专利搜索

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发明名称	SPUTTERING TARGET DEVICE
摘要
申请公布号	JPH03247761(A)	申请公布日期	1991.11.05
申请号	JP19900044193	申请日期	1990.02.23
申请人	NAKAMURA YOSHIHISA;OUCHI KAZUHIRO;TOYO INK MFG CO LTD	发明人	NAKAMURA YOSHIHISA;OUCHI KAZUHIRO;ISHIGURO HIDEYUKI
分类号	C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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