| 摘要 |
PURPOSE:To work many holes or indentations having a very small diameter at a very small space to a work by pulse energy by controlling the pulse frequency and the feed speed of the work in the stage of releasing impulsively the energy. CONSTITUTION:A YAG laser, solid laser, gas laser, semiconductor laser or the like is used as a laser oscillator 1. The oscillator 1 is controlled by a control circuit 10 by which the laser generated by having prescribed pulses is changed in route by a reflecting mirror 4. Said laser is focused by a focusing lens 5 and is irradiated, if necessary, through a mask, to a work 7 as the pulse energy of the laser of a desired shape and size such as a spot having a prescribed very small diameter or a short line or the like. On the other hand, the work 7 is fixed onto a working table 6 and the table 6 is moved by feed motors 8, 9 in the X-, Y- axes. The surface of the work 7 is worked by the pulse energy as the table 6 moves. |
