发明名称 |
FLUORINATED POLY(ARYLENE ETHERS) |
摘要 |
Fluorinated poly(arylene ethers) having a repeat unit such as (A) are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips. |
申请公布号 |
WO9116369(A1) |
申请公布日期 |
1991.10.31 |
申请号 |
WO1990US07203 |
申请日期 |
1990.12.07 |
申请人 |
RAYCHEM CORPORATION |
发明人 |
MERCER, FRANK, W.;SOVISH, RICHARD, C. |
分类号 |
C08G65/40;C08G75/23;C08L71/00;C08L71/08;C08L71/10;C08L81/06;H01L23/29;H01L23/498;H01L23/532;H05K1/00;H05K1/03 |
主分类号 |
C08G65/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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