| 摘要 |
This invention relates to a technique being effective in applying it to the control of the oscillation wavelength and output of a laser device. The object thereof is that the inclination of a wavelength selecting element such as an etalon is adjusted with high accuracy and the wavelength of the laser output of a laser resonator is made always stable. A laser device having at least first and second wavelength selecting elements which are aligned on an optical path and make the bandwidth of the laser beam narrow by adjusting the inclination of at least one of the elements, is provided with an automatic micrometer head for the fine adjustment of the inclination. By using the automatic micrometer capable of controlling finely the quantity of movment, the inclination to the optical path of the wavelength selecting elements can be adjusted finely. Thereby, the wave length of the laser beam can be always stabilized. Therefore, the laser device can be utilized effectively, for example, for the light source of the lithography process of semiconductor manufacturing. |
