PROCEDE DE REALISATION DES PIECES POLAIRES ET DE L'ENTREFER DE TETES MAGNETIQUES EN COUCHES MINCES POUR APPLICATION INFORMATIQUE AUDIO OU VIDEO.

摘要

A method of manufacturing the pole pieces and the gap of magnetic heads in thin layers for computer, audio and video applications, starting from a silicon substrate, includes formation of an insulator layer on a silicon substrate followed by deposition of a metal layer on the insulator layer and of a masking resin layer on the metal layer. The substrate covered with the insulator layer and the metal layer is etched to form wells bordering a bar of a determined width and the left-over portion of the metal layer etched is removed. The etched substrate is thermally oxidized to develop a silicon oxide layer enabling the bar to be adjusted to obtain the desired gap. A conductive layer is deposited at the bottom of the wells followed by the electrolytic deposition of a magnetic material in the wells and the removal of the left-over portion of the insulator layer initially deposited on the substrate.