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发明名称
CLEANING DEVICE FOR DISK SUBSTRATE
摘要
申请公布号
JPH03245389(A)
申请公布日期
1991.10.31
申请号
JP19900043238
申请日期
1990.02.22
申请人
SUPIIDE FUAMU CLEAN SYST KK;MITSUBISHI ELECTRIC CORP
发明人
USUI EIJI;MORITA TOMOJI
分类号
G11B23/50
主分类号
G11B23/50
代理机构
代理人
主权项
地址
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