SPEKTROMETER-OBJEKTIV FUER DIE ELEKTRONENSTRAHL-MESSTECHNIK.
摘要
The spectrometer lens for a scanning electron microscope uses a magnetic element (OL) with a short focal length incorporating a magnetic deflection system (DS) symmetrical w.r.t. the optical axis (OA). The deflection system (DS) is prositioned between the electrode system (G1) for capturing the emitted secondary electrons (SE) and the electrodes (K1,K2) for generating the counter field used to brake the secondary electrodes (SE). Pref. a single-stage deflection system (DS) is used.
申请公布号
DE3681634(D1)
申请公布日期
1991.10.31
申请号
DE19863681634
申请日期
1986.06.13
申请人
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH, 8011 HEIMSTETTEN, DE
发明人
FEUERBAUM, DR. DIPL.-PHYS., HANS-PETER, W-8000 MUENCHEN 83, DE;FROSIEN, DR. DIPL.-ING., JUERGEN, W-8012 OTTOBRUNN, DE
