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发明名称
Verfahren zur herstellung niederohmiger metall-siliziumkontakte
摘要
申请公布号
DD295427(A5)
申请公布日期
1991.10.31
申请号
DD19900341861
申请日期
1990.06.20
申请人
发明人
分类号
H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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