| 摘要 |
A pressure sensing capacitor utilising two planar layers (41, 141) of conductive material disposed substantially parallel to each other, but separated by a narrow gap. The conductive layers are formed as coatings on two imperforate insulative plates (11, 111), at least one of the plates being a diaphragm adapted to flex when subjected to a change in pressure. The diaphragm is supported by a first wall portion (20) which extends rearwardly away from the front surface of the diaphragm, and by an inwardly facing edge (22) of the peripheral portion (14) to which it is integrally connected. The capacitor can be electrically connected to electronic circuitry adapted to condition the capacitor output signal to an indication of pressure, or pressure difference, and so can be part of a transducer. |
