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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH03243764(A)
申请公布日期
1991.10.30
申请号
JP19900040596
申请日期
1990.02.20
申请人
ULVAC JAPAN LTD
发明人
SUGIYAMA HARUO
分类号
C23C14/35;G11B5/31;H01J37/147;H01L21/203
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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