| 摘要 |
PURPOSE:To obtain a sufficient recording current and to reduce the heat generation of a coil part by laminating a magnetic material film and a conductor film successively and sectioning a conductor coil rectangularly while setting the ratio of height and width within a specific range. CONSTITUTION:A lower magnetic material film 11, made of permalloy, etc., on a substrate 10, form a lower core. An insulator film (SiO2) 42 is formed on the top surface of the lower magnetic material film 11, and conductor film 2 are formed on the insulator film 42 to form coils 21 and 21. The coils 21 and 21 are rectangular and have multilayered strcture, and the ratio of height H and width W in its section is set to 0.2-2. Polyamide resin 6 is provided to the coils 21 and 21 to flatten surfaces between the layers. An upper magnetic material film 12 made of permalloy, etc., is formed so that the film thickness at the tapered part of the resin 6 does not decrease, and forms an upper core. The lower core 11 and upper core 12 constitute a magnetic circuit 1. |
