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发明名称
WAFER HOLDER FOR LOW PRESSURE CVD FILM FORMING DEVICE
摘要
申请公布号
JPH03244143(A)
申请公布日期
1991.10.30
申请号
JP19900039781
申请日期
1990.02.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
FUJII ATSUHIRO;HAGIWARA KATSUTOSHI
分类号
H01L21/683;H01L21/68
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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