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发明名称
ELASTIC MODULUS MEASURING APPARATUS FOR THIN FILM
摘要
申请公布号
JPH03242531(A)
申请公布日期
1991.10.29
申请号
JP19900040152
申请日期
1990.02.20
申请人
NEC CORP
发明人
OKUDA SHINICHI
分类号
G01B21/32;G01N3/08
主分类号
G01B21/32
代理机构
代理人
主权项
地址
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