FORMATION OF SEMICONDUCTOR FILM,申请号JP19900038477-传众专利搜索

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发明名称	FORMATION OF SEMICONDUCTOR FILM
摘要
申请公布号	JPH03242934(A)	申请公布日期	1991.10.29
申请号	JP19900038477	申请日期	1990.02.21
申请人	MITSUBISHI ELECTRIC CORP	发明人	WASHITANI AKIHIRO;OMORI MASASHI
分类号	H01L21/205;H01L21/316	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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