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发明名称
ELECTRON BEAM EXPOSING DEVICE
摘要
申请公布号
JPH03241818(A)
申请公布日期
1991.10.29
申请号
JP19900038677
申请日期
1990.02.20
申请人
MATSUSHITA ELECTRON CORP
发明人
IMORIYA TADASHI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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