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发明名称
DRYETCHING DEVICE
摘要
申请公布号
JPH03241828(A)
申请公布日期
1991.10.29
申请号
JP19900040274
申请日期
1990.02.20
申请人
ROHM CO LTD
发明人
SAGARA TOSHIHISA
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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