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发明名称
SEALING EQUIPMENT
摘要
申请公布号
JPH03241753(A)
申请公布日期
1991.10.28
申请号
JP19900038069
申请日期
1990.02.19
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
HATANO NORIHIKO
分类号
B42D15/10;H01L21/56
主分类号
B42D15/10
代理机构
代理人
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地址
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