发明名称 |
Technique for manufacturing interconnections for a semiconductor device. |
摘要 |
<p>Electrical connections to specified semiconductor or electrically conductive portions (18, 26, and 30) of a structure created from a semiconductive body (10) are created by a process in which a titanium contact layer (34) is deposited on the structure over the specified portions. An electrically conductive barrier material layer (36) which consists principally of non-titanium refractory material is formed over the contact layer. The resulting structure is then annealed at a temperature above 550 DEG C in order to lower the contact resistance. The anneal is preferably done at 600 DEG C or more for 10 - 120 seconds in a gas whose principal constituent is nitrogen. An electrically conductive primary interconnect layer is formed over the barrier material layer after which all three layers are patterned to create a composite interconnect layer. <IMAGE></p> |
申请公布号 |
EP0453029(A1) |
申请公布日期 |
1991.10.23 |
申请号 |
EP19910200861 |
申请日期 |
1991.04.12 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
CHUNG, HENRY WEI-MING;YAO, TSUI-YING |
分类号 |
H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/52;H01L23/532 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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