发明名称 Pressure vacuum vessel and method of manufacture.
摘要 <p>A pressure/vacuum vessel (20) is disclosed which has a reduced number of edges (51/61 to 58/68) and no multiple-edge (multiple-weld) junctions. As a result of the absence of multiple-edge junctions, leaks can be readily detected and fixed. In addition, the vessel (20) is fabricated relatively easily. &lt;IMAGE&gt;</p>
申请公布号 EP0452778(A2) 申请公布日期 1991.10.23
申请号 EP19910105628 申请日期 1991.04.09
申请人 APPLIED MATERIALS INC. 发明人 TEPMAN, AVI
分类号 B23K9/00;B01J3/00;B01J3/04;B23K15/06;C23C14/56;F16J12/00;H01L21/205;H01L21/3065 主分类号 B23K9/00
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