| 摘要 |
PURPOSE:To obtain the temperature sufficient for laser oscillation by low electric power input, and reduce the heat loss caused by radiation from an inner discharge tube, by forming a high melting point metal layer on the outer periphery of the inner discharge tube. CONSTITUTION:A high melting point metal layer 15 having high heat reflection factor which is sprayed and formed on the outer periphery of an inner discharge tube 2 is insulated from a cathode 5 or an anode 9. Heat reflecting plates 16 which cover closely both end portions of an atmospheric heat insulating layer 3 are arranged between the tube 2 and a vacuum jacket 1 on both end portions in the axial direction of the tube 2. The heat generated by pulse discharge between electrodes in an atmosphere of discharge gas 14 in the tube 2 is reflected by the high melting point metal layer 15. Hence, even when the pulse voltage applied to electrodes is small, the temperature in the inner discharge tube 2 can be increased up to a sufficient value for laser oscillation. |
